This is a leak test system for miniature electronic components such as MEMS, crystal oscillators, power semiconductors, and relays. Testing from large leaks to small leak as small as 1×10-10Pa・m3 / sec can be carried out under a single unit. Helium bombing time and dwell time can also be managed.
|Target Work Size||12mm ～1210(SMD)|
|Accuracy||1×10-10Pa・m3 / sec (He)|
|External Dimensions (Unit: mm)||W920×H1200×D820
*Excluding the signal tower