Hermetically sealed electronic components such as MEMS, crystal oscillators, semiconductor devices are used in a wide range of applications.
High speed inspection
The test method by immersion (Fluorinert + helium) and test method of Fukuda products (air + helium) are described in the diagram below.
Carry out gross leak testing using differential pressure type air leak testing. The leak rate of the work (tested component) is detected as values by placing work and master into small capsules and comparing the pressure. Leak testing of to 3×10-6Pa・m3/s(at 400kPa・G)(to 2×10-7Pa・m3/s Equivalent standard leak).
Fine leak test is performed using helium gas to measure minute leak that cannot be detected by gross leak within the controlled exposure time. The measurement range of measuring devices of Fukuda is approx. 1×10-9～1×10-5Pa・m3/s(He)